A

Automatic Tip Exchange

ATX automatically locates tips by pattern recognition and uses a novel magnetic approach to disengage a used tip and pick up a new tip. The laser spot is then automatically optimized along the X- and Y-axis by motorized positioning knobs.

C

Cantilever

Cantilever is a part with a tip that senses the surface properties (topographic distribution, physical robustness, electrical properties, magnetic properties, chemical properties, etc.). Cantilever includes the silicon chip, a cantilever hanging from the chip, and a tip hanging from the end of the cantilever.

 

Chip Carrier

Chip Carrier is a Park AFM accessory that holds a Cantilever Chip and mounts to the Probehand.

 

Cantilever Chip

Cantilever Chip is a silicone part designed to facilitate the attachment of the fine cantilever to the chip carrier.

Conductive AFM

Conductive Atomic Force Microscopy (C-AFM) gauges nanoscale electrical properties by scanning a conductive-tipped cantilever across a sample, simultaneously measuring topography and conductivity. Utilizing a current amplifier, C-AFM visualizes local conductivity variations, making it crucial for semiconductor device analysis. It offers adaptable current amplifier options, including internal, variable gain, and ultra-low noise models. C-AFM's precision aids in diverse applications, such as leakage current assessment and probing switching properties in materials like nanowires and thin films. Additionally, it performs current-voltage spectroscopy for detailed electrical characterization. C-AFM operates contact mode, ensuring effective short-range repulsive interactions for versatile material compatibility.

Contact Mode

Contact mode in atomic force microscopy (AFM) utilizes cantilever bending, maintaining a low spring constant to prevent sample damage. It employs repulsive contact forces between the tip and sample, causing cantilever bending proportional to changes in topography. The deflection, detected optically, ensures constant force during scanning, generating topography images based on Z scanner motion and allowing for effective high-speed contact imaging.

E

Electrochemical Microscopy (EC-AFM)

Electrochemical Atomic Force Microscopy (EC-AFM) combines high-resolution imaging with electrochemical characterization. Operating in a liquid environment with reactive species, it uses a three-electrode system to apply bias, induce electrochemical reactions, and visualize surface changes. Key in battery and corrosion studies, EC-AFM monitors redox reactions, exemplified by Cu deposition and dissolution on Au. This technique offers valuable insights into nanoscale electrochemical processes, vital for diverse research and industrial applications.

F

Force Modulation Microscopy (FMM)

Force Modulation Microscopy (FMM) enhances Atomic Force Microscopy (AFM) by applying mechanical modulation to the cantilever during contact scanning. FMM measures nanomechanical properties, including stiffness and adhesion, through amplitude and phase shifts. Employed for distinguishing material variations in polymer composites, it prevents tip and sample damage with small oscillation amplitudes. The DC signal ensures constant force for topography, while the AC signal reveals sample responses. FMM aids in detailed material composition studies, offering nuanced insights into surface variations and degradation processes.

Force-Distance Spectroscopy

Force Distance (FD) spectroscopy in Atomic Force Microscopy (AFM) quantitatively analyzes nanomechanical properties like Young’s modulus and adhesion force. The cantilever serves as a force sensor, measuring tip-sample interactions through deflection. Regions of interaction (A to E) include electrostatic, van der Waals, capillary, and Pauli forces. FD curves reveal deformation, modulus, and adhesion. Calibration using thermal tune or Sader tune ensures accurate force measurement. Quantitative data on stiffness, modulus, adhesion, and energy dissipation contribute to material characterization. Examples include biological cell studies and single-molecule spectroscopy for DNA interactions. FD spectroscopy provides force-volume imaging for detailed material property mapping.

I

I-V Spectroscopy

Using a cantilever as a nanometer scale contact, IV spectroscopy provides a plot of the current (I) as a function of the tip bias voltage (V) applied to a sample. In order to investigate the electrical properties of the sample surface, IV spectroscopy is measured on the selected sample area after taking a sample image.

M

Magnetic Force Microscopy (MFM)

Magnetic Force Microscopy (MFM) is an atomic force microscopy (AFM) technique for nanoscale characterization of magnetic properties. It employs a ferromagnetic-coated tip to map magnetic domain distribution and strength. Using Non-contact mode, MFM detects surface topography while measuring magnetic forces, revealing material-specific contrasts. The 'Dual Pass' technique enhances MFM results by separating signals. MFM is vital in magnetic storage research, offering nanoscale insights into domain patterns, densities, and magnetic state changes, crucial for optimizing data storage technologies like PMR and LMR.

N

Non-Contact Mode

The Non-Contact mode is a technique where a piezoelectric modulator vibrates a cantilever near its resonant frequency, detecting changes in van der Waals forces via a patented Z-servo feedback system to maintain a tip-surface distance of a few nanometers without causing damage to either surface.

 

Non-Contact Mode

P

Park AFM Options

C-AFM	Conductive AFM
EC-Cell	Electrochemistry Cell
EFM	Electrostatic Force Microscopy
FMM	Force Modulation Microscopy
GloveBox for FX40
GloveBox for NX10
GloveBox for NX12
High Voltage Tool Kit
Hysitron Head
Liquid Probehand
Live Cell Chamber for NX12
MFM	Magnetic Force Microscopy
Open Liquid Cell
PCM for FX40	Photo Current Mapping
PCM for NX10	Photo Current Mapping
PCM for NX20	Photo Current Mapping
PFM	Piezoresponse Force Microscopy
SAM	Signal Access Module
Sample Chuck & Holder
SCM	Scanning Capacitance Microscopy
SICM	Scanning Ion Conductance Microscopy
SmartLitho
Spring Cal	Spring Constant Calibration
SSRM	Scanning Spreading Resistance Microscopy
SThM	Scanning Thermal Microscopy
STM	Scanning Tunneling Microscopy
TC-AE	Temperature Control Acoustic Module
TCS1	Temperature Controlled Stage 1
TCS2	Temperature Controlled Stage 2
TCS3	Temperature Controlled Stage 3
Universal Liquid Cell

 

Park AFM Product

Industrial Equipment	Research Equipment
NX-3DM	FX40
NX-Block	FX200
NX-eAFM	FX200-IR
NX-HDM	NX7
NX-HybridWLI	NX10
NX-IR	NX12
NX-Mask	NX20
NX-PTR	NX20 Lite
NX-TSH	NX-Hivac
NX-TSH300PS	NX-IR
NX-TSH400TF
NX-TSH600
NX-Wafer

*PS: Probe Station
  TF: Tape Frame

PinPoint™ Conductive AFM

PinPoint nanoelectrical modes in Atomic Force Microscopy (AFM) reduce tip wear and damage. PinPoint C-AFM ensures precise electrical contact, improving spatial resolution and reproducibility. PinPoint PFM optimizes piezoelectric property mapping, enhancing signal-to-noise ratio. PinPoint SSRM minimizes tip wear in scanning spreading resistance microscopy, providing accurate, stable data for semiconductor resistance distribution studies.

PinPoint™ Nanomechanical Mode

PinPoint nanomechanical mode in Atomic Force Microscopy (AFM) accelerates force-distance measurements, enhancing efficiency. It eliminates lateral shear forces, ensuring precise nanomechanical measurements for modulus, deformation, adhesion, energy dissipation, and stiffness. Users can customize channel selection for high-resolution topography and various quantitative mechanical data. PinPoint facilitates real-time visualization, offering a significant speed advantage over traditional force-volume mapping methods. The mode enables simultaneous imaging of surface topography and mechanical properties, supporting studies in polymers, 2D materials, living cells, and more.

Position Sensitive Photo Detector (PSPD)

PSPD detects the beam position and converts it to an electrical signal in the Voltage unit.

A-B : Vertical bending of the cantilever. →Topography

C-D : Lateral twist of the cantilever. →Frictional information (LFM)

A+B : Laser intensity.

Cell 1 + Cell 2 = A

Cell 3 + Cell 4 = B

Cell 1 + Cell 3 = C

Cell 2 + Cell 4 = D

S

Scanning Thermal Microscopy (SThM)

Scanning Thermal Microscopy (SThM) explores nanostructured materials' thermal properties using nanofabricated thermal probes. Operating in Temperature Contrast Mode (TCM) and Thermal Conductivity Contrast Mode (CCM), SThM provides high spatial and thermal resolution. In TCM, it measures sample temperature variations, while CCM assesses thermal conductivity. Nanofabricated probes, controlled by a Wheatstone bridge, enhance spatial resolution. SThM distinguishes material variations, making it valuable for diverse applications, including polymer composites and device temperature mapping.

T

Tapping Mode

Tapping mode in Atomic Force Microscopy (AFM) dynamically scans surfaces using an oscillating cantilever, intermittently contacting the sample. Unlike True Non-contact mode, Tapping mode operates at the transition between attractive and repulsive forces, making intermittent contact. It uses cantilever oscillation amplitude, affected by tip-sample interaction, as feedback for topography reconstruction. The technique's resonance frequency shift, detected through amplitude changes, provides information on material-specific properties. Tapping mode enables qualitative imaging of mechanical and material distribution through the phase signal.

Tip

Tip Height

Tip Height is distance between the cantilever and the end of the tip.

 

 

Tip Length

Tip Length is the distance from the point where the angle suddenly decreases to the end of the Tip, measured in nm or μm, after going through the sharpening process or creating a different tip on the Base Tip.

 

 

Tip Width

 

Tip Width refers to the width at a distance to the desired length from the end of the Tip. 
Typically, the Tip Width is displayed in the Front View, but the Tip Width in the Side View can also be displayed if necessary.