With the evolution of nanotechnology, the need to understand nano-scale and sub nano-scale surface properties is becoming increasingly important. Particularly, surface properties such as topography and roughness play an important role in the overall performance of a material. For example, in integrated circuits manufacturing, chemical mechanical polishing (CMP) has been used to control the surface roughness of wafers and other substrates, which directly determines the reliability of final products [1,2]. In semiconductor devices packaging, wafer to wafer bonding quality is determined by the roughness of bonding surfaces. It was found that surfaces with high roughness values introduce voids in the bonded interface, and bonding failure occurs when the roughness exceeds a critical threshold [3]. In the field of scientific research, surface topography can be correlated with other material properties to better understand material behaviors for practical applications [4–6].