Material Si/SiO2-substrate with an applied layer of (3-Glycidyloxypropyl)- trimethoxysilane (GLYMO) 3-Glycidyloxypropyl)-trimethoxysilane (GLYMO) Experimental Delta and Psi-Maps were recorded with an spectroscopic imaging ellipsometer nanofilm_ep4 at a wavelength of 400 nm. The system was equipped with a 10x objective and the focus scanner was used Results Microscopic Delta map of post application treated silane films
