Research AFM

Large Sample AFM

We are redefining semiconductor metrology with our Large Sample Atomic Force Microscopes, essential for tackling the challenges posed by shrinking nodes and complex 3D devices. As traditional microscopies reach their limits, Park AFMs offer unmatched precision, automation, and high-resolution imaging for nanoscale analysis. Our versatile models support design, defect detection, and quality control across various semiconductor applications and budgets—enabling faster, more accurate characterization and process optimization.