

MEMS
Imaging Ellipsometry
Spectroscopic ellipsometry enables precise measurements on 2D material flakes
as small as 1 µm, allowing researchers to explore nanoscale optical properties.
It provides microscopic maps of thickness distribution and refractive index
across a spectral range of 190 to 1700 nm. With Ellipsometric Contrast
Micrographs (ECM), users can achieve significantly enhanced contrast compared to traditional optical microscopy, making it easier to distinguish layer numbers and detect inhomogeneities. The system also supports non-destructive
measurements on transparent substrates, using knife-edge illumination to
eliminate unwanted backside reflections and ensure accurate data acquisition.
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